| Applications: |
| Soldermask outerlayer |
Flex-circuit flat panel displays |
| High-density interconnect photo-chemical machining |
Resist type: dry film or liquid etch |
| Exposure: |
| Hybrid collimated OLEC light source |
2x - single-sided exposure |
| Vacuum soft contact, 8 - 12 inches Hg, monitored and alarmed |
Two 8 kW lamp units – selectable low (2.5 kW), medium (5 kW), high power (8 kW) |
| Lamp change time typically 5 minutes per lamp |
Uniformity typical +/- 10% |
| Integrator range 0 to 999 units – calibrates to 2 mJ |
OLEC Spectramatch halide lamp options available: L1280, L1281, L1282 |
| Resolution <= 1 mil line and space (depending on resist and process optimization) |
|
| Capability: |
Panel size: minimum 12" x 12" (305mm x 305mm)
maximum 24" x 30" (610mm x 762mm)
|
Panel thickness: minimum 0.002" (50 microns)
maximum 0.078" (3 mm) – 10mm option |
| Capacity 60 - 240 panels per hour |
|
| Registration: |
| Panel handling vertically without vacuum cups |
Panel transport controlled using solid state linear motion – accuracy +/- 10 microns |
| Artwork post main vacuum confirm mode |
X, Y, and Theta control via servomotors |
| Accuracy +/- 0.0005" (+/- 12.5 microns) “best fit” |
Repeatability +/- 0.0004" (+/- 10 microns) |
| Selectable tolerance ranges available |
|
| Glass Tooling: |
| Artwork setup time < 2 minutes |
UV high-transmissive |
| Temperature: |
| System closed-loop feedback system employing IR pyrometer |
Closed-loop cooling – no heat loading to exposure room |
| Accuracy setpoint +/- 2 C – setpoint is typically 16 C -25 C |
|
| General: |
Class 100 HEPA air pressure
|
Employs positive pressure environment control system |
| Safety interlocks on all doors, light curtain in exposure section, and E-stop fitted |
Control networking data capability |
| Machine flow: left to right or right to left |
Meets UL, CE standards |
| Utilities: |
| Electrical: 208 VAC - 480 VAC, 3 Phase, 50/60 Hz |
Compressed Air: 5 cfm @ 90 psi. (6 bar) |
| Dimensions: |
| 97' x 66.7" x 88" (2464mm x 1694mm x 2235mm) |
|